제품소개

반도체/LED 산업용 x-ray XSCAN-A090 2018-07-09 15:21:54
반도체/LED 산업용 x-ray
Focal Spot Size
5㎛

Voltage/Current
130kV / 300uA

Magnification
x158 / x316

X-Ray Detector
FPD (Flat Panel Detector)

Detector Tilt Angle
Tilt 50˚

Manipulator
Basic] 4-Axis (X, Y, Z, Detector Tilt) / Option] Cone Beam CT Rotation

Table size (=Inspection Area)
500 x 500 mm

Max. Sample Loading
5kg

X-Ray Leakage Dose
<1uSv/hour

Dimension (WxDxH mm)
1360 x 1440 x 1700

Equipment Weight(kg)
1400kg

Power Supply
220 VAC Single phase 50/60Hz

Remarks
Option] Cone Beam CT&3D / Rotation Table
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